Faster heatup: Single heater chamber sizes up to 18kW.

Rapid installation: Customized plumbing connections

Benefits and Specifications

• Unmatched heating of semiconductor process fluids upto 210°C.

• Patented heater gas purge system ensures long element life and reduced cost of ownership.

• Thick walled chamber provides long service life in the harshest high temperature applications.

• Element purge monitoring minimizes ionic contamination potential. Cleanroom assembly and testing ensures the highest manufacturing standards.

• All fluoropolymer wetted parts provide outstandingcompatibility with virtually any chemistry.

• Low watt density design enables precise and stable control of process temperature.

• PVDF high temperature mounting brackets (Hightemperature model)

• Options:

• Horizontally mounted configuration

• Integral cooling coils

• 100 ohm RTDs or “J”, “K”, or “E” type process and

  element thermocouples

• Lower watt density heaters for special applications