400V 1P 6KW PFA Housing Semiconductor Inline Chemical Heater For Siconnex Etch Hood

Overview

PFA in-line heater are desinged for hydrofluoric acid (HF), potassium hydroxide (KOH), and other chemistry compatible with PFA.

These PFA heaters push widely accepted high-purity materials to operating extremes while maximizing performance and reliability.

We has once again taken heating of high-purity liquids to a new level of performance and reliability.

We has once again taken heating of high purity liquids to a new level of performance and reliability. Heating liquids using high purity materials in a harsh environment requires special skills and knowledge that can only be gained from experience. For over 40 years, Our Engineers have been refining and improving the heated quartz bath and understand the critical needs of the Semiconductor and related industries. The sum of that knowledge has been incorporated into the PFA in-line heater to create products that not only perform, but simplify installation and maintenance as well. Exemplified by our long-standing ISO 9001 registration, our dedication to manufacturing process control assures that our customers receive uniformly high-quality products in a timely manner. We offers a wide range of standard and custom models to allow for easy integration into almost any application.

• Heavy gauge pre-formed Inconel element can stand up to high stress conditions without breaking down
• Power modulator monitors heater element temp and prevents heat buildup inside the housing
• Sealed housing prevents chemistry from attacking internal components & provides secondary containment
• Internal leak detect strip (requires external monitor) gives early detection of chemical leaks
• All wiring shielded with teflon conduit to prevent chemical attack
• Indirect heating design, no submerged heater elements
• No N2 or gas purge required

Features

• No O-Ring seals
• All wetted surfaces are high purity PFA
• PTFE housing for double containment
• Maximized watt density for performance
• Light weight construction
• Small foot print enabled by unique design
• Zero maintenance required
• PFA fluid path, wide chemistry compatibility
• High temperature capability 200°C+

 

Specifications

Heater	PFA In-line Chemical Heater
Wattages	1.5-12 kW
Process Chemistries	Dilute Hydrofluoric acids (DHF), Buffered Hydrofluoric acids (BHF), Buffered Oxide etch (BOE), Alkaline Chemicals (TMAH, KOH, NAOH), Fluorinated Solvents, Hydrofluoric Acid, Glycol, and much more.
Max Operating Temperature	180°C (consult factory for higher temperatures)
Max Pressure	40 psi at 180°C
Voltages	200-400VAC, single or 3 phase model dependent

 

 

Applications

Electrochemical Deposition

Electrochemical Deposition is a cost-effective process using oxidation and reduction to adhere metal to a surface using electricity. The process is also sometimes referred to as Electro-Plating. Surplus products deliver full power supply output performance, high efficiency, high-speed DC output, connectivity, reliability, and ETL certification.

 

Electrochemical Deposition  Products(1)
B SERIES – SMALL TANK Small metal over the side heater. Excellent for laboratory and small tank applications. Heats up to 300°F (149°C). Single phase. 500-1500 watts, 120-240 volts..	3HS SERIES – TUBULAR Over the side, 3 element, tubular heater. Three phase. Three phase. 3000-10500 watts, 208-600 volts.	MOTS SINGLE – DERATED Derated, low watt density, metal over the side heater. Single or three phase. 500-6000 watts, 120-600 volts.
HXF SERIES Low-watt density, spiral heater. Fluoropolymer (PTFE) sleeved 304 stainless elements inert to most solutions. 500-6000 watts, 120-600 Volts.	FLS SERIES FLANGE HEATER Metal flanged heater, 3″, 5″ and 6″ flange sizes. 3000-72000 watts, 208-600 volts.	U SERIES COIL Metal Immersion Coil in U shape for chemical heating or cooling requiring minimal recovery time. Available in steel, 316 stainless steel and titanium.